한국 반도체 장비 제조업체가 Dongfeng의 MGN9 스테인리스강 미니어처 리니어 가이드를 사용하여 클린룸 미립자 오염을 제거하고 무급유 작동 기간을 3개월에서 14개월로 연장했습니다.
Customer Challenge
A semiconductor equipment manufacturer in South Korea needed miniature linear guides for a wafer transfer robot operating inside a Class 10 cleanroom. The existing linear guides showed particulate generation after 3 months of continuous operation, contaminating the cleanroom environment and causing wafer yield drops. The customer needed a guide with stainless steel construction, low particulate emission, and maintenance-free operation for at least 12 months.
Dongfeng Solution
Dongfeng supplied MGN9 miniature linear guides in stainless steel 440C construction with dual-seal ball retainers to minimize particulate generation. The guides were manufactured under cleanroom-compatible assembly protocols, with each unit individually tested for running torque consistency and particle count. Material certificates confirming 440C stainless steel composition and surface passivation treatment were provided with each shipment.
Results & Valuealue
The MGN9 stainless steel guides passed the customer's 6-month cleanroom particulate test with zero contamination events detected. Wafer yield improved by 2.3% after the upgrade. The maintenance-free operation period extended from 3 months to 14 months, reducing equipment downtime by 60%. The customer certified Dongfeng as an approved supplier for all future wafer handling modules.les.
Key Specifications
- Product: MGN9 miniature linear guide
- Accuracy: P5 grade
- Material: Stainless steel 440C
- Rail length: 300mm
- Cleanroom: Class 10 compatible
- Operating temp: -20 to 80°C
- Batch size: 80 sets
- Certification: SGS material test