韩国一家半导体设备制造商采用东风的 MGN9 不锈钢微型直线导轨，消除了洁净室颗粒污染，并将免维护运行期从 3 个月延长至 14 个月。
Customer Challenge
A semiconductor equipment manufacturer in South Korea needed miniature linear guides for a wafer transfer robot operating inside a Class 10 cleanroom. The existing linear guides showed particulate generation after 3 months of continuous operation, contaminating the cleanroom environment and causing wafer yield drops. The customer needed a guide with stainless steel construction, low particulate emission, and maintenance-free operation for at least 12 months.
Dongfeng Solution
Dongfeng supplied MGN9 miniature linear guides in stainless steel 440C construction with dual-seal ball retainers to minimize particulate generation. The guides were manufactured under cleanroom-compatible assembly protocols, with each unit individually tested for running torque consistency and particle count. Material certificates confirming 440C stainless steel composition and surface passivation treatment were provided with each shipment.
Results & Value
The MGN9 stainless steel guides passed the customer's 6-month cleanroom particulate test with zero contamination events detected. Wafer yield improved by 2.3% after the upgrade. The maintenance-free operation period extended from 3 months to 14 months, reducing equipment downtime by 60%. The customer certified Dongfeng as an approved supplier for all future wafer handling modules.
Key Specifications
- Product: MGN9 miniature linear guide
- Accuracy: P5 grade
- Material: Stainless steel 440C
- Rail length: 300mm
- Cleanroom: Class 10 compatible
- Operating temp: -20 to 80°C
- Batch size: 80 sets
- Certification: SGS material test